Вид документа : Статья из журнала Шифр издания : 54/I-70 Автор(ы) : Kamenetskih A. S., Gavrilov N. V., Kuznetsov M. V., Chukin L. V. Заглавие : Investigation of TiC/a-C:H coatings prepared by reactive magnetron sputtering in nonself-sustained plasma catode discharge Место публикации : Известия высших учебных заведений. Физика. - 2012. - Т. 55, № 12-2. - С. 141-144 ББК : 54 Предметные рубрики: ХИМИЧЕСКИЕ НАУКИ Ключевые слова (''Своб.индексиров.''): нанокомпозиты--распыление--осаждение Аннотация: Nanocomposite coatings based on crystalline TiC phase with 3-8 nm grain size embedded in an amorphous hydrocarbon a-C:H matrix are deposited by pulsed magnetron sputtering of Ti-target in Ar/C 2H 2 gas mixture ionized by pulse (50 kHz, 10 μs) low-energy (100-400 eV) electron beam. The effects of acetylene flow rate, substrate bias and ion current density on composition and hardness of the coatings have been investigated by XRD, XPS and indentation tests. The hardness of TiC/a-C:H coatings raised by 20 % then ion current density increased by 30 % due to increasing of electron beam current up to 1 A. Adhesive coatings with 5 μm thick, hardness of ~ 5-35 GPa and deposition rate of 1.4 1.9 μm/h have been obtained. Доп.точки доступа: Kamenetskih , A. S.; Gavrilov, N. V.; Kuznetsov, M. V.; Кузнецов Михаил Владимирович; Chukin, L. V.