Aluminum nitrde CVD synthesis: technological synthesis approaches / R. A. Shishkin et al. // Mendeleev Congress on General and Applied Chemistry (26-30 September, 2016, Ekaterinburg) : Abstract book in 5 volumes / Ural Branch of the Russian Academy of Sciences, I. Ya. Postovsky Institute of Organic Synthesis [et al.]. - Vol. 2b : Chemistry and Technology of Materials and Nanomaterials. - Ekaterinburg, 2016. - P. 106.