Mechanical properties and composition of tisicn coatings obtained by decomposition of hexamethyldisilazane and anodic evaporation of titanium in a low pressure ARC discharge / A. I. Men’shakov, Yu .A. Bryuhanova, I. S. Zhidkov, P. A. Skorvnina // 5th International Conference "Gas Discharge Plasmas and Their Applications" (GDP 2021) : abstracts, September 5-10, 2021, Ekaterinburg, Russia. - Ekaterinburg, 2021. - C. 173.